Document Basket

Saved pages

Saved documents

Please note: This information is saved in a cookie. In case your browser deletes cookies after a session, the information will be lost.

Need support?

Please leave a message

×
Thank you for your message. A representative will get in touch with you shortly.

FSM 500 series

Upgrade version for 128 series;

Up to 500C;

Non-Contact Laser Scanning Technology.

Product description

Stress Hysteresis Measurement up to 500C for thermal property and stability tests of thin films in inert gas. Non-Contact Laser Scanning Technology.

Special Features

Evaluate the thermal properties and stability (film stress) of thin films up to 500 degree C in inert gas. 200mm or 300mm chamber. Manually loading.

  • Semiconductor, Solar & Electronics

Technical Specification

1. Proven platform in semiconductor for stress mapping.

2. Stable, accurate and fast.

3. Up to 500C

Contact Us

Shanghai
Room Unit 605-607, Build 2, Xinglian Building,
No.1535 Hongmei Road, Xuhui District, Shanghai
TEL: 021-5383 8811

FAX: 021-3367 8466
Frontier Semiconductor (FSM)FSM is a leading semiconductor metrology equipment manufacturer specialized in optical instrumentation for automated stress and thickness measurement systems, as well as adhesion tester and electrical tests. We are located in San Jose, CA with offices in all major semiconductor locations around the world. Our customers include all major front end and back end semiconductor fabs. We also serve solar, LED, and other semiconductor related industries, as well as universities and research centers.
[FSM, 500, 500C, Non-Contact Laser Scanning]