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FSM 500 series

Upgrade version for 128 series;

Up to 500C;

Non-Contact Laser Scanning Technology.

Product description

Stress Hysteresis Measurement up to 500C for thermal property and stability tests of thin films in inert gas. Non-Contact Laser Scanning Technology.

Special Features

Evaluate the thermal properties and stability (film stress) of thin films up to 500 degree C in inert gas. 200mm or 300mm chamber. Manually loading.

  • 半导体,太阳能和电子

Technical Specification

1. Proven platform in semiconductor for stress mapping.

2. Stable, accurate and fast.

3. Up to 500C

Contact Us

上海
上海市徐汇区虹梅路1535号
星联大厦2幢605-607
TEL: 021-5383 8811

FAX: 021-3367 8466
Frontier Semiconductor, IncFrontier Semiconductor, Inc, (FSM), offers a range of advanced metrology products and solutions for semiconductor, LED, Solar, FPD, Data Storage and MEMS applications. We have over 25 years experience in stress measurement, film adhesion testing, wafer topography metrology, and electrical characterization. Our latest offerings include unique technology to meet the metrology needs of 3DIC manufacturing and to monitor stress of large flat panels. FSM has local sales and support offices in all major semiconductor clusters. Other areas are covered by a network of local representatives.
[FSM, 500, 500C, Non-Contact Laser Scanning]