文件篮

已储存的网页

已储存的文件

请注意: 此信息已储存入缓存文件内。若您所使用的浏览器会于浏览后删除缓存文件,则有关信息将会消失

帮助

请留下您的信息

×
感谢您的留言
Tango - Onyx

Compact system designed to meet High performance R&D and Low volume Production with Individual modules for all necessary functions of DeGas, Preclean, sputter deposition and a high vacuum robotic transfer chamber.


 -Single wafer sputtering system
 Ÿ-Smallest Foot print in industry
 -Fully Automated Cassette to Cassette


Designed to meet High performance R&D and Low volume Production Plug and Play System Design with minimal setup time.
D-source magnetron technology with proven process flows gives the flexibility to deposit a variety of films.

Special Features

Applications :

  • ŸSingle layer, Multi-layer metals, oxides and semiconductors
  • ŸCo-sputtered alloys of metals, oxides
  • ŸRF or Pulsed DC or DC sputtering
  • ŸSoftware with Remote diagnostics, SECS/GEM compliance
  • ŸReliable system with high uptime, >92%
  • 半导体,太阳能和电子
Tango Systems, Inc

Based in the heart of Silicon Valley, Tango Systems, Inc. is a leading innovator in high performance, cost-effective PVD systems. The Axcela™ platform is the first in a new line of Cluster tools, currently used in high-volume production all across the globe.

Over the last decade, Tango's flexible Axcela™ 200/300 series has supplied tools for manufacturing in the Advanced Packaging, Hard Disk Drive (both Magnetic and non-Magnetic films), Ultra-thin films, Interposers and TSV markets, all with the industry's lowest Cost of Ownership.

[Tango, Onyx]