DKSH (China) Ltd., 3rd Floor, Tomson Commercial Building
710 Dong Fang Road
Pudong, Shanghai 200122
+86 21 5830 0518 1002
|Monday to Friday, 9am-6pm (CST)|
Compact system designed to meet High performance R&D and Low volume Production with Individual modules for all necessary functions of DeGas, Preclean, sputter deposition and a high vacuum robotic transfer chamber.
-Single wafer sputtering system
-Smallest Foot print in industry
-Fully Automated Cassette to Cassette
Designed to meet High performance R&D and Low volume Production Plug and Play System Design with minimal setup time.
D-source magnetron technology with proven process flows gives the flexibility to deposit a variety of films.
Based in the heart of Silicon Valley, Tango Systems, Inc. is a leading innovator in high performance, cost-effective PVD systems. The Axcela™ platform is the first in a new line of Cluster tools, currently used in high-volume production all across the globe.
Over the last decade, Tango's flexible Axcela™ 200/300 series has supplied tools for manufacturing in the Advanced Packaging, Hard Disk Drive (both Magnetic and non-Magnetic films), Ultra-thin films, Interposers and TSV markets, all with the industry's lowest Cost of Ownership.