The chuck repair service is dedicated to wafer chucks damaged in device manufacturing processes to a state equivalent to new using our vast knowledge of ceramics.
• for photolithography on ASML, Nikon, Canon, ...
• for Etching/CVD on Novellus (LAM), SPTS, Anelva, Nissim, ...
Please, consult us for machine compatibilities and designs.
Outline of wafer chuck regeneration
- Refurbishing chuck surfaces
- Refurbishing degraded sections
- Refurbishing air leaks