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Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics. We can provide electrostatic chucks and ceramic heaters catering to user needs by utilizing several material technologies. We can also provide services for the development and experimental production of electrostatic chucks and ceramic heaters according to region of use such as plasma and electron beam environments:

Electrostatic chuck with heater (ESC/Heater)

Material: AIN (Aluminum nitride)

Electrostatic chucks (ESC)

Material: Al2O3(Alumina) plate

Material: Thermal sprayed Al2O3

Ceramic heater

Material: AIN (Aluminum nitride)

  • Semiconductor, Solar & Electronics
  • Electronics
NTK CeratecNTK Ceratec produce structural ceramics that are used as precision parts and functional parts in devices for semiconductor and liquid crystal manufacturing, and as abrasion-resistant parts in crushers and similar machinery. In addition, we offer piezoceramics used in manufacturing systems for cars, industrial machinery, semiconductors, and liquid crystals.
[NTK Ceratec, Electrostatic chuck]