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We can provide optimal pin chucks tailored to strict requirements through customized design using world-class flattening process technology (flatness of 0.2 μm for 12-inch chucks).

Can flexibly be adjusted planar shapes of pin chucks with variable unevenness according to the shapes of wafers and customize absorption zones and pin patterns to enhance absorption responsiveness:


Usage

  • wafer fixation for semiconductor exposure equipment
  • wafer fixation for wafer inspection equipment


Features

  • High precision: flatness of 0.2 μm with local flatness of not more than 0.05 μm
  • Shape control: adjustable chuck shapes in accordance with the shapes of wafers (unevenness control)
  • Absorption responsiveness: customized planar design following specifications

     
  • Electronics
  • Semiconductor, Solar & Electronics
NTK CeratecNTK Ceratec produce structural ceramics that are used as precision parts and functional parts in devices for semiconductor and liquid crystal manufacturing, and as abrasion-resistant parts in crushers and similar machinery. In addition, we offer piezoceramics used in manufacturing systems for cars, industrial machinery, semiconductors, and liquid crystals.
[NTK Ceratec, Vacuum Chuck]