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The spacers are the interleaves placed in between the wafers for protecting the sides from scratches and particle contamination. They are made with very high pure materials offering extreme performances against the particle contamination and the outgassing risks. All the models have embossed shape and are compatible with 4“, 5“, 6“, 8“ and 12“ wafers and framed-wafers.

Anti Statics PE: 350µm thick, Surface resistivity <1*10E+12 Ω

Conductive PE: 250µm thick, Surface resistivity <1*10E+9 Ω

The rings are also interleaves, but rigid ones, permitting to limit the surface contact in between the wafer. The system guarantee the wafer protection and doesn’t decrease the wafer carrier capacity. They are particularly advised for Bump wafers and CMOS wafers.

  • Product name: Protos Spacers Type PEA
  • Sizes: WSR-200 (8”) and WSR-300 (12”)
  • Material: Conductive PC
  • Resistance: <1*10E+5 Ω
  • Low particle level and Low ion contamination
  • Semiconductor, Solar & Electronics

PEA models: antistatic

Part Name Protos Spacer PEA Type
Part Number PEA-4-350
PEA-5-350 PEA-5-350
PEA-6-350 PEA-6-350
PEA-8-350 PEA-8-350
PEA-12-350 PEA-12-350
Feature This is new type antistatic spacer with low particle counts
and low ion contamination. and low ion contamination.
Surface Surface
Resistance < 1.0 x 1012Ω
Standard Sheet thickness: 100um, with height of emboss 350um
Material Anti-static Polyethylene

CPS models: conductive

Part Name Protos Spacer CPS Type
Part Number CPS-4-250
CPS-5-250 CPS-5-250
CPS-6-250 CPS-6-250
CPS-8-250 CPS-8-250
CPS-12-250 CPS-12-250
Feature This is new type conductive spacer with low particle counts and low ion contamination.
Surface Surface
Resistance < 1.0 x 109Ω
Standard Sheet thickness: 100um, with height of emboss 250mm
Material Conductive Polyethylene
AchillesAchilles is manufacturing wafer handling systems with high purity materials for safe transportation of wafers.
[Achilles, Protos spacers, Ring spacers]