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NTK Ceratec - Chuck repair service (6'', 8'' and 12'')

FRANCE

Damien Dimarco, Sales Manager

+33 4 7855 7856
Fax +33 4 7855 7887
Contact Email
DKSH Technology
1475 Quai du Rhone
01702 Miribel
France
NTK Ceratec Chuck repair service before NTK Ceratec Chuck repair service after

The chuck repair service is dedicated to wafer chucks damaged in device manufacturing processes to a state equivalent to new using our vast knowledge of ceramics.

• for photolithography on ASML, Nikon, Canon, ...

• for Etching/CVD on Novellus (LAM), SPTS, Anelva, Nissim, ...

Please, consult us for machine compatibilities and designs.


Features

  • Inspection system before and after Refurbishing using a wide array of inspection facilities
  • Ability to completely remove deposits during Refurbishment
  • Ability to produce ceramic spray chucks in addition to ceramic chucks


Outline of wafer chuck regeneration

- Refurbishing chuck surfaces

  • Improvement of surface roughness
  • Restoration of flatness
  • Reshaping of dimples


- Refurbishing degraded sections

  • Rejoining of metal foil and ceramics
  • Refilling of joining layers


- Refurbishing air leaks

  • Replacing O-rings

  • Electronics
  • Semiconductor, Solar & Electronics
NTK CeratecNTK Ceratec produce structural ceramics that are used as precision parts and functional parts in devices for semiconductor and liquid crystal manufacturing, and as abrasion-resistant parts in crushers and similar machinery. In addition, we offer piezoceramics used in manufacturing systems for cars, industrial machinery, semiconductors, and liquid crystals.

Supplementary products

[NTK Ceratec, Chuck repair service, Chuck damaged, Chuck refurbishment]

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