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InnoLas Solutions - Linear Table Machine - LINEXO

LINEXO is a versatile laser processing workstation designed for high-precision applications in the electronic, precision engineering, and photovoltaic industries. It is often used in R&D environments, as well as production of smaller substrates as e.g. ceramic PCBs.

Technical specifications

Applications Micro Via Drilling, Routing, Depaneling, Micro Structuring,
Selective Ablation, Cavity Formation
Accuracy < +/-10 μm abs.
< +/-2 μm repeatability
Substrate Dimension up to 610 x 410 mm
Thickness > 50 μm
PCB, ceramic, silicon, metal
Available laser sources Wave length: 9.4, 10.6 μm (CO2), 1064, 1030, 532, 515,
355 nm
Pulse: μs, ns, ps, fs
Dimensions 1700 x 2100 x 2700 mm

Key features

  • Fixed optic or scanner setup
  • Single or dual process heads
  • Process gas (N2 , O2, Ar, ...)
  • Processing one or more substrates in parallel
  • Automatic camera calibration
  • Automated routines for reference runs
  • Automated process control
  • Automated vision system for precision alignment
  • and scaling, offset, trapezoidal and rotation
  • compensation
  • Stand alone and production line integrated system

InnoLas Solutions ILS LT Ceramic

  • Semiconductor, Solar & Electronics
InnoLas Solutions GmbHInnoLas Solutions was founded in October 2013 as a demerger of InnoLas PV and electronic business and looks back on over 20 years experience in laser technology. A team of laser specialists develops customer specific applications in our lab. Furthermore we adapt these laser processes to the challenges of today‘s production requirements.
[innolas, linexo, laser systems, linear table machine]