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Nordson Electronics Solutions - Automated Plasma Treatment System - FlexTRAK® SHS

Industry-Leading Throughput and Reliability

Built upon Nordson Electronics Solutions' patented plasma technology, the FlexTRAK®-SHS is our latest fully automated plasma system incorporating a high-capacity F3-S chamber, to provide high uniformity and increased productivity. The chamber architecture remains the same as the smaller FlexTRAK platform, providing a seamless transition between chambers as production demands more capacity.


Key Applications

  • Pre-wire bond plasma treatment on semiconductor package substrates and lead frames
  • Pre-underfill plasma treatment on flip chip packages 
  • Pre-mold plasma treatment on semiconductor package substrates and lead frames
  • Plasma treatment of semiconductor package substrates and lead frames for improved adhesion 
  • Removal/reduction of oxidation on lead frame

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Technical Specification

W x D x H – Footprint 2314 x 1935 x 1787 mm (2293 H mm with light tower)
91.1 x 76.2 x 70.5 in (90.3 H in with light tower)
Net Weight 1305 kg (2,871 lbs)
Chamber Volume F3-S chamber: 9.6 liters (585 in³)
F3 chamber: 5.5 liters (338 in³)
Powered Electrode Dimensions W x D F3-S chamber: 305 x 610 mm (12 x 24 in)
F3 chamber: 305 x 305 mm (12 x 12 in)
RF Power: Standard Wattage F3-S chamber: 1000 W
F3 chamber: 600 W
RF Power: Frequency 13.56 MHz
Gas Control: Maximum Number of MFCs 4

For further details, please refer to enclosed brochure.

Key Features

Industry-Leading Throughput

  • Large capacity F3-S process chamber

  • Simultaneous strip buffering and processing

  • Advanced automation and magazine splitting capabilities

New Product Development

  • Advanced material handling

  • Ability to accommodate increasingly larger strip sizes

  • Sophisticated jam detection

Application Flexibility

  • Plasma chamber effectiveness

  • Configurable process chamber

  • Versatile treatment modes
  • Semiconductor, Solar & Electronics
Nordson Electronics SolutionsNordson Electronics Solutions is a leading provider of plasma processing technology to various industries such as semiconductor, PCB, microelectronics, solar, LED, and medical & life science device manufacturing. The company has global presence with offices and labs in several locations including California, Florida, Europe, Singapore, China, Japan, Korea, India and Taiwan. Nordson Electronics Solutions has been continuously innovating for more than two decades and offers a range of patented plasma processing systems that have won awards. The company also has a team of expert scientists and engineers to help develop plasma processes that enhance product reliability and production yields.