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Tango - Onyx

Compact system designed to meet High performance R&D and Low volume Production with Individual modules for all necessary functions of DeGas, Preclean, sputter deposition and a high vacuum robotic transfer chamber.

  • Single wafer sputtering system
  • Smallest Foot print in industry
  • Fully Automated Cassette to Cassette

Designed to meet High performance R&D and Low volume Production Plug and Play System Design with minimal setup time.
D-source magnetron technology with proven process flows gives the flexibility to deposit a variety of films.

Special Features

Applications :

  • ŸSingle layer, Multi-layer metals, oxides and semiconductors
  • ŸCo-sputtered alloys of metals, oxides
  • ŸRF or Pulsed DC or DC sputtering
  • ŸSoftware with Remote diagnostics, SECS/GEM compliance
  • ŸReliable system with high uptime, >92%
  • Semiconductor, Solar & Electronics
Tango Systems

Based in the heart of Silicon Valley, Tango Systems, Inc. is a leading innovator in high performance, cost-effective PVD systems. The Axcela™ platform is the first in a new line of Cluster tools, currently used in high-volume production all across the globe.

Over the last decade, Tango's flexible Axcela™ 200/300 series has supplied tools for manufacturing in the Advanced Packaging, Hard Disk Drive (both Magnetic and non-Magnetic films), Ultra-thin films, Interposers and TSV markets, all with the industry's lowest Cost of Ownership.

[Tango, Onyx]