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UnitySC Axiospect

High end Auto inspection microscope for wafer inspection and defect review and optional Macro station module .

Product description

Optical wafer inspection and defect review  tool for high resolution front and back side inspection with wafer flip and optional edge inspection.
Macro station module available.
Ideally suited for Litho and OQA.

Special Features

1. Integrated flip module on robot

2. Vacuum-based wafer handling for standard applications with high throughput and attractive price

3. Several metrology options available

Technical Specification

1. wafer flip function

2. versatile handling capability

3. Macro Station

4. Edge Module

Contact Us

Shanghai office
Room Unit 605-607, Build 2, Xinglian Building,
No.1535 Hongmei Road, Xuhui District, Shanghai
TEL: 021-5383 8811
FAX: 021-3367 8466
  • Semiconductor, Solar & Electronics

UnitySC is recognized worldwide as a key player in inspection and metrology, combining advanced technologies in automated optical inspection and 3D imaging with microscopy, temporal-mode interferometry, and spectrometry, which enables customers to deliver higher yields and faster time to market. Customers include the largest foundries, integrated device manufacturers, outsourced semiconductor assembly and test service providers, and R&D centers. The company provides standard and customized advanced process control solutions adapted to specific industrial needs and constraints, enabling a new era in process control. Headquartered in Grenoble, France, the company maintains offices in Taiwan and is supported by a network of representatives.

[High end Zeiss optics, Versatile for full wafer inspection, Field benchmark, Auto, 0.15um resolution, Semi-auto, manual operation, UnitySC, Axiospect]