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High end Auto inspection microscope for wafer inspection and defect review and optional Macro station module .
Optical wafer inspection and defect review tool for high resolution front and back side inspection with wafer flip and optional edge inspection.
Macro station module available.
Ideally suited for Litho and OQA.
1. Integrated flip module on robot
2. Vacuum-based wafer handling for standard applications with high throughput and attractive price
3. Several metrology options available
1. wafer flip function
2. versatile handling capability
3. Macro Station
4. Edge Module
| Shanghai Room Unit 605-607, Build 2, Xinglian Building, No.1535 Hongmei Road, Xuhui District, Shanghai |
TEL: 021-5383 8811 FAX: 021-3367 8466 |
UnitySC is recognized worldwide as a key player in inspection and metrology, combining advanced technologies in automated optical inspection and 3D imaging with microscopy, temporal-mode interferometry, and spectrometry, which enables customers to deliver higher yields and faster time to market. Customers include the largest foundries, integrated device manufacturers, outsourced semiconductor assembly and test service providers, and R&D centers. The company provides standard and customized advanced process control solutions adapted to specific industrial needs and constraints, enabling a new era in process control. Headquartered in Grenoble, France, the company maintains offices in Taiwan and is supported by a network of representatives.
