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High resolution automatic optical inspection tool (AOI) with 1 µm sensitivity @ 80 wph (300 mm).

Product description

High-end fully automated optical inspection (AOI) system for front and back side
Best-in-class sensitivity and throughput allow for lowest COO in industry
Integrated optical review and metrology functions

Special Features

1. Simultaneous front and back side scan, optional edge inspection‎

2. For 100% excursion control

Technical Specification

1. modular concept to enable 360° view to your wafer including FS/BS and Edge module

2. versatile handling capabilities

3. Ultra Low COO

Contact Us

Shanghai office
Room Unit 605-607, Build 2, Xinglian Building,
No.1535 Hongmei Road, Xuhui District, Shanghai
TEL: 021-5383 8811
FAX: 021-3367 8466
  • Semiconductor, Solar & Electronics

UnitySC is recognized worldwide as a key player in inspection and metrology, combining advanced technologies in automated optical inspection and 3D imaging with microscopy, temporal-mode interferometry, and spectrometry, which enables customers to deliver higher yields and faster time to market. Customers include the largest foundries, integrated device manufacturers, outsourced semiconductor assembly and test service providers, and R&D centers. The company provides standard and customized advanced process control solutions adapted to specific industrial needs and constraints, enabling a new era in process control. Headquartered in Grenoble, France, the company maintains offices in Taiwan and is supported by a network of representatives.

[High end Zeiss optics, Versatile for full wafer inspection, Field benchmark, high end fully-auto, 1um high throughput, inspection, UnitySC, ODIN]