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UnitySC - WOTAN

CHINA

Christy Liu, General Manager, Semiconductor & Electronics, Technology

+86 21 6475 3257
Fax +86 21 3367 8466
Contact Email
DKSH (Shanghai) Ltd.
Unit 2208, Innov Tower, Block A, 1801 Hongmei Road
200233 Shanghai
China

UnitySC WOTAN

High throughput automatic optical inspection tool (AOI) with 20 or 10µm sensitivity @ 150 wph.

Product description

High throughput fully automated optical inspection (AOI) system
Dedicated to OQA, excursion control, Fab and tool monitoring at lowest COO
Recipe-free operation

Special Features

1. Simultaneous front and back side scan, optional edge inspection‎

2. For 100% excursion control

Technical Specification

1. modular concept to enable 360° view to your wafer including FS/BS and Edge module

2. versatile handling capabilities

3. Ultra Low COO

Contact Us

Shanghai office
Room Unit 605-607, Build 2, Xinglian Building,
No.1535 Hongmei Road, Xuhui District, Shanghai		 TEL: 021-5383 8811
FAX: 021-3367 8466

  • Semiconductor, Solar & Electronics
UnitySC

UnitySC is recognized worldwide as a key player in inspection and metrology, combining advanced technologies in automated optical inspection and 3D imaging with microscopy, temporal-mode interferometry, and spectrometry, which enables customers to deliver higher yields and faster time to market. Customers include the largest foundries, integrated device manufacturers, outsourced semiconductor assembly and test service providers, and R&D centers. The company provides standard and customized advanced process control solutions adapted to specific industrial needs and constraints, enabling a new era in process control. Headquartered in Grenoble, France, the company maintains offices in Taiwan and is supported by a network of representatives.

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