The NST Series is a non-contact, full field metrology solution. The NST Series is pushing the boundaries of conventional microscopy with performances that stretch beyond contact profilometry and into the AFM space.
Key benefits
•Cu CMP
•Hybrid Cu bonding
•Front-end CMP
•Front-end etch
Technologies
•Phase Shifting Interferometry (PSI)
•Vertical Scanning Interferometry (VSI)
•Time domain IR spectroscopy
•IR microscopy