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High throughput automatic optical inspection tool (AOI) with 20 or 10µm sensitivity @ 150 wph.
High throughput fully automated optical inspection (AOI) system
Dedicated to OQA, excursion control, Fab and tool monitoring at lowest COO
Recipe-free operation
1. Simultaneous front and back side scan, optional edge inspection
2. For 100% excursion control
1. modular concept to enable 360° view to your wafer including FS/BS and Edge module
2. versatile handling capabilities
3. Ultra Low COO
| 上海 | |
| 上海市徐汇区虹梅路1535号 星联大厦2幢605-607 |
TEL: 021-5383 8811 FAX: 021-3367 8466 |
UnitySC is recognized worldwide as a key player in inspection and metrology, combining advanced technologies in automated optical inspection and 3D imaging with microscopy, temporal-mode interferometry, and spectrometry, which enables customers to deliver higher yields and faster time to market. Customers include the largest foundries, integrated device manufacturers, outsourced semiconductor assembly and test service providers, and R&D centers. The company provides standard and customized advanced process control solutions adapted to specific industrial needs and constraints, enabling a new era in process control. Headquartered in Grenoble, France, the company maintains offices in Taiwan and is supported by a network of representatives.
