High throughput fully automated optical inspection (AOI) system
Dedicated to OQA, excursion control, Fab and tool monitoring at lowest COO
Recipe-free operation
1. Simultaneous front and back side scan, optional edge inspection
2. For 100% excursion control
1. modular concept to enable 360° view to your wafer including FS/BS and Edge module
2. versatile handling capabilities
3. Ultra Low COO
上海 | |
上海市徐汇区虹梅路1535号 星联大厦2幢605-607 |
TEL: 021-5383 8811 FAX: 021-3367 8466 |