The cushions are the main protection placed inside the wafer carriers and absorbing external chocks and internal moves of the wafers stack. They are compatible with 4“, 5“, 6“, 8“ and 12“ wafers, and exist with different thicknesses: 3mm, 5mm and 6mm.
Their multi-layer structure improves their mechanical performances and offers a high purity grade. One thick PE core is covered with PE films on both sides.
Antistatic multi-layer cushions:
Conductive multi-layer cushions:
Technical specifications
|
Type PEAS
|
---|---|
Part number
|
MA-4PEAS-1/3/5/6/10 (for 4 inch)
MA-5PEAS-1/3/5/6/10 (for 5 inch)
MA-6PEAS-1/3/5/6/10 (for 6 inch)
MA-8PEAS-1/3/5/6/10 (for 8 inch)
MA-12PEAS-1/3/5/6/10 (for 12 inch)
|
Feature
|
Stable antistatic performance
Cleanliness (Independent foaming/Surface film lamination)
Excellent impact absorption
|
Surface resistance value
|
< 1.0×1012Ω
|
Standard
|
Available with 5 cushioning thicknesses: 1mm, 3mm, 5mm, 6mm, 10mm
|
Material
|
Polyethylene cushion laminated by Polyethylene film
|
Configuration
|
Antistatic multi-layer cushion
|
Technical specifications
|
|
---|---|
Part Number
|
MA-4U-5/10/15/20 (for 4 inch)
MA-5U-5/10/15/20 (for 5 inch)
MA-6U-5/10/15/20 (for 6 inch)
MA-8U-5/10/15/20 (for 8 inch)
MA-12U-5/10/15/20 (for 12 inch)
|
Feature
|
Stable antistatic performance
Low cost
Excellent impact absorption
|
Surface Resistance Value
|
< 1.0×1011Ω
|
Standard
|
Available with 4 cushioning thicknesses: 5mm, 10mm, 15mm, 20mm
|
Material
|
Anti-Static Polyurethane
|
Configuration
|
Antistatic single layer cushion
|
Technical specifications
|
Type PESD
|
---|---|
Part Number
|
MA-4PESD-1/3/5/10 (for 4 inch)
MA-5PESD-1/3/5/10(for 5 inch)
MA-6PESD-1/3/5/10(for 6 inch)
MA-8PESD-1/3/5/10(for 8 inch)
MA-12PESD-1/3/5/10(for 12 inch)
|
Feature
|
Stable conductive performance
Cleanliness(Independent foaming)
Excellent impact absorption
|
Surface Resistant Value
|
1.0×105Ω |
Standard
|
Available with 4 cushioning thicknesses: 1mm, 3mm, 5mm, 10mm
|
Material
|
Conductive Polyethylene
|
Configuration
|
Conductive single-layer cushion
|