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Achilles - Protos spacers and Ring spacers

Aurélie Blanc

Sales Manager

04 78 55 78 70
Contact Email
DKSH France S.A.
1475 Quai du Rhone
01702 Miribel
France

SINGAPORE

Kelvin Low, Senior Manager

+65 6274 1222
Fax +65 6273 1503
DKSH Singapore Pte Ltd
625 Lorong 4 Toa Payoh, #03-00
319519 Singapore
Singapore
  • Brochure Achilles Wafer carriages - Protected
    (PDF, 1 MB)
Achilles Protos spacer Achilles Ring spacer

The spacers are the interleaves placed in between the wafers for protecting the sides from scratches and particle contamination. They are made with very high pure materials offering extreme performances against the particle contamination and the outgassing risks. All the models have embossed shape and are compatible with 4“, 5“, 6“, 8“ and 12“ wafers and framed-wafers.

Anti Statics PE: 350µm thick, Surface resistivity <1*10E+12 Ω

Conductive PE: 250µm thick, Surface resistivity <1*10E+9 Ω

The rings are also interleaves, but rigid ones, permitting to limit the surface contact in between the wafer. The system guarantee the wafer protection and doesn’t decrease the wafer carrier capacity. They are particularly advised for Bump wafers and CMOS wafers.

  • Product name: Protos Spacers Type PEA
  • Sizes: WSR-200 (8”) and WSR-300 (12”)
  • Material: Conductive PC
  • Resistance: <1*10E+5 Ω
  • Low particle level and Low ion contamination

PEA models: antistatic

Part Name Protos Spacer PEA Type
Part Number PEA-4-350
PEA-5-350 PEA-5-350
PEA-6-350 PEA-6-350
PEA-8-350 PEA-8-350
PEA-12-350 PEA-12-350
Feature This is new type antistatic spacer with low particle counts
and low ion contamination. and low ion contamination.
Surface Surface
Resistance < 1.0 x 1012Ω
Standard Sheet thickness: 100um, with height of emboss 350um
Material Anti-static Polyethylene

CPS models: conductive

Part Name Protos Spacer CPS Type
Part Number CPS-4-250
CPS-5-250 CPS-5-250
CPS-6-250 CPS-6-250
CPS-8-250 CPS-8-250
CPS-12-250 CPS-12-250
Feature This is new type conductive spacer with low particle counts and low ion contamination.
Surface Surface
Resistance < 1.0 x 109Ω
Standard Sheet thickness: 100um, with height of emboss 250mm
Material Conductive Polyethylene

  • Semiconductor, Solar & Electronics
AchillesAchilles is manufacturing wafer handling systems with high purity materials for safe transportation of wafers.

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