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Rugged, precise, and easy-to-use instruments that accurately and efficiently

The Agilent HLD MR30 Leak Detector uses a mass spectrometer tuned to detect helium, which is used as a tracer gas to locate and/or measure very small leaks in enclosed devices or systems. The mobile HLD MR30 is both a precise instrument and a robust workhorse, featuring an easy-to-use touch screen interface and menu structure that quickly connect users to powerful leak detection capabilities. Built-in application setups shorten test cycles, and setups can be saved to assure repeatability. It is easily rolled to convenient locations on its four wheels. The MR30 includes an Agilent DS-602 Rotary Vane Pump, with a pumping speed of 30 m3/hour, for very rapid evacuation of test parts and systems and rapid clean-up of ambient helium between test cycles.

Technical specifications

User interface 21 cm (8.4 in) touch screen
Primary pump and pumping speed DS 602 Rotary Vane Pump, 30m3/hour (21 cfm)
Sensitivity 5x10-12 mbar•L/s, 5x10-12 atm•cc/s, 5x10-13 Pa•m3/s
Maximum Test Port Pressure 13 mbar (10 Torr, 1333 Pa) 200 mbar (150 Torr, 20000 Pa) in Gross Leak Mode
Calibration - Automatic internal and external - Able to check calibration while in test
Languages Chinese, English, French, German, Japanese, Korean, Russian, Spanish
Communication capabilities Analog output and Serial communications are standard. Optional discrete IO interface.
Available options Wireless remote (100 m), discrete IO interface, Harsh Environment Probe, automated test fixture.
Built-in application setup guides Sniffing, Spray Helium, Auto Sequencer (programmable test cycle), High Sensitivity, Split Flow, PPM Sniffing

Key features

  • Six different application set up guides helps you correctly configure your instrument for the best performance, ensuring that parameters are properly set for a thorough and efficient test.
  • Larger, more durable, more responsive touch screen interface rotates 180° for ideal viewing.
  • Cleaner, more intuitive user interface. Immediate access to often used features and a flat menu structure allows you to quickly find the setting you need.
  • Startup wizard helps user set up the instrument on first-time power up.
  • Enhanced charting capabilities: Zoom for closer inspection of data, color-coded set points, time-based plot records leak rate and pressure.
  • A large work surface provides plenty of room for parts to be tested, tools, etc.
  • Improved power-off process keeps spectrometer under vacuum and protects the turbomolecular pump.
  • Improved maneuverability for easier access to narrow service areas and chases in semiconductor fabs or other production environments.

How to leak check a vacuum furnace using an Agilent HLD Leak Detector

  • Semiconductor, Solar & Electronics
Agilent TechnologiesAgilent is a leader in life sciences, diagnostics and applied chemical markets. The company provides laboratories worldwide with instruments, services, consumables, applications and expertise, enabling customers to gain the insights they seek. Agilent’s expertise and trusted collaboration give them the highest confidence in our solutions.