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Our business line "Research" represents the German company Von Ardenne in France, including MPS business unit. This business unit makes R&D PVD systems for university laboratories, CNRS, private laboratories in the semi-conductor and photovoltaic field.
The range of the system proposed by this business unit is from one process chamber (with or without load lock) to in-line multi-chamber, with also batch systems as clusters equipped by several process chambers. The size of the samples which could be processed on these different systems varies from really small to 400*400 mm2.
Thanks to their many fully active references, Von Ardenne is one the most preferred suppliers for this kind of systems.