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The core components for the manufacturing of solar cells using heterojunction technology (HJT) are HELiAPECVD and PVD. The systems are perfectly coordinated, both technologically and with regard to their total throughput of 2,400 wafers per hour.
HELiA – ‘High Efficiency Low impurity Apparatus’ – is a platform for two coating processes in heterojunction-based cell coating. The HELiAPECVD with the S-CubeTM applies the intrinsic a-Si layer for passivation, as well as the amorphous and doped a-Si layers, p and n. The HELiAPVD carries out front and rear surface coating using conductive TCO – with no turning of the wafer required.
Thanks to low operating temperatures, heterojunction is the ideal technology for the very thinnest wafers.