X'Pert³ MRD | Materials Research System

Goniometer- Step Size

Minimum step size 0.0001˚

Goniometer- Radius

Radius: X’Pert³ MRD 320 mm (horizontal); Radius: X’Pert³ MRD XL 420 mm (horizontal)

Open Eulerian Cradle- Chi Rotation

+/- 92˚

Open Eulerian Cradle- Phi Rotation

2 x 360˚

Open Eulerian Cradle- x,y translation

100 x 100 mm (X’Pert³ MRD); 200 x 200 mm (X’Pert³ MRD XL)

Open Eulerian Cradle- z translation

minimum step size 1 µm

C-to-C Wafer Loaders- Size

2” to 150 mm; 100 to 300 mm

Available models

PANalytical X’Pert³ MRD

Technical
Goniometer- Step Size	Minimum step size 0.0001˚
Goniometer- Radius	Radius: X’Pert³ MRD 320 mm (horizontal); Radius: X’Pert³ MRD XL 420 mm (horizontal)
Open Eulerian Cradle- Chi Rotation	+/- 92˚
Open Eulerian Cradle- Phi Rotation	2 x 360˚
Open Eulerian Cradle- x,y translation	100 x 100 mm (X’Pert³ MRD); 200 x 200 mm (X’Pert³ MRD XL)
Open Eulerian Cradle- z translation	minimum step size 1 µm
C-to-C Wafer Loaders- Size	2” to 150 mm; 100 to 300 mm

The standard research and development version for use with thin film samples, wafers (complete mapping up to 100 mm) and solid materials. High-resolution analysis capability is improved by the outstanding accuracy of a new high-resolution goniometer using Heidenhain encoders.

Read more on the website of our partner

PANalytical X'Pert³ Extended MRD (XL)

Technical Specifications
Enclosure- Dimensions	1400 (w) x 1162 (d) x 1947 (h) mm
Enclosure- Weight	1150 kg
Enclosure- Accessibility	Large doors, allowing access for up to four people simultaneously
Enclosure- Safety	Meets all relevant worldwide regulations for electrical, mechanical and X-ray safety, with all anode types
Enclosure- Set-up	System is on wheels for easy installation and relocation
Goniometer- Configuration	Vertical goniometer, available in theta-theta or alpha-1 geometry
Goniometer- Radius and Interface	240 mm radius, interfaces are available to reduce the diffracted beam radius for specific applications
Goniometer- Usable Range	Maximum usable range (depending on accessories) -111°< 2θ <168°
Goniometer- Linearity	2θ linearity equal or better than ±0.01°
Goniometer- Accuracy and Precision	New generation direct optical encoding system (DOPS 2) for lifetime goniometer accuracy, using precisely aligned Heidenhain encoders and path tracking technology
X-Ray Source- X-Ray Tube	Fully ceramic X-ray tubes manufactured by PANalytical’s specialized factory under cleanroom conditions
X-Ray Source- Generator	4 kW generator supporting all current and future X-ray tubes
X-Ray Source- Performance	All Empyrean instruments are designed for 60 kV operation, allowing optimal performance for Mo and Ag sources

The X'Pert³ Extended MRD (XL) brings increased versatility to the range of X'Pert³ MRD systems. An extra PreFIX mounting platform allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing significantly the intensity of the incident beam. One can benefit from increased application versatility without compromise on data quality, high-resolution X-ray diffraction with high intensities, shorter measurement times for measurements such as reciprocal space mapping and rebuild from standard to extended configuration in minutes thanks to the PreFIX concept. With the 2nd generation PreFIX, reconfiguring is easy and optics positioning is more accurate than ever.

Read more on the website of our partner

PANalytical X'Pert³ MRD (XL) In-plane

Technical Specifications
Enclosure- DimI3:J22ensions	1400 (w) x 1162 (d) x 1947 (h) mm
Enclosure- Weight	1150 kg
Enclosure- Accessibility	Large doors, allowing access for up to four people simultaneously
Enclosure- Safety	Meets all relevant worldwide regulations for electrical, mechanical and X-ray safety, with all anode types
Enclosure- Set-up	System is on wheels for easy installation and relocation
Goniometer- Configuration	Vertical goniometer, available in theta-theta or alpha-1 geometry
Goniometer- Radius and Interface	240 mm radius, interfaces are available to reduce the diffracted beam radius for specific applications
Goniometer- Usable Range	Maximum usable range (depending on accessories) -111°< 2θ <168°
Goniometer- Linearity	2θ linearity equal or better than ±0.01°
Goniometer- Accuracy and Precision	New generation direct optical encoding system (DOPS 2) for lifetime goniometer accuracy, using precisely aligned Heidenhain encoders and path tracking technology
X-Ray Source- X-Ray Tube	Fully ceramic X-ray tubes manufactured by PANalytical’s specialized factory under cleanroom conditions
X-Ray Source- Generator	4 kW generator supporting all current and future X-ray tubes
X-Ray Source- Performance	All Empyrean instruments are designed for 60 kV operation, allowing optimal performance for Mo and Ag sources

With the X'Pert³ MRD (XL) system for in-plane diffraction, it becomes possible to measure diffraction from lattice planes that are perpendicular to the sample surface.

Standard and in-plane geometries on one system and a wide range of diffraction experiments on polycrystalline and highly perfect thin films, are just two of many benefits.