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The Atlas 3D metrology tool is a modular surface measurement system for quality assurance and process control. Depending on specific needs, different types of 3D sensor technologies can be configured, making it a flexibel tool that allows accurate results at a broad variety of 3D measuring requirements, materials and geometries. Its software supports automation and efficiency in a production environment. Interferometric 3D sensors allow high speed measurements with up to 80,000 points in as few as 130 milliseconds at lateral resolutions down to 4 µm.

Key Features

  • Customized recipes, easy to automate
  • Ultra fast measurements
  • Wide variety of sensor selections
  • Large lateral measurement range
  • Flexible data analysis tools

Sensor Types

  • Chromatic confocal point sensors
  • Chromatic confocal line sensors
  • White light interferometric sensors
  • Line triangulation sensors

Using sensors with point confocal, line confocal, interferometric or line triangulation technology, its height resolution ranges from 1 nm to 200 µm. The Atlas software solution combines two software tools: a measurement recipe creation tool and a flexible analysis tool. This unique combination is ideal for applications in research and development, failure analysis and low volume semi-automated measurement.

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Technical Specification

Lateral Working Range up to 400 mm x 400 mm
Vertical Working Range 100 µm to 80 mm
Lateral Resoultion 1 µm up
Vertical Resolution 1 nm up

For further details, please refer to enclosed brochure.

Atlas Custom Metrology Solution

  • Semiconductor, Solar & Electronics
SolariusSolarius is a leading provider of precision systems for non-contact surface inspection, measurement, analysis, and visualization. Our products combine high-resolution sensors with automated data acquisition systems and powerful analysis tools. Offerings range from desktop systems for off-line inspection, to semi-automated systems for fast, precise measurements, to customized multi-station platforms for high-volume in-line inspection. Our design philosophy focuses on standard products as well as customized solutions to best meet specialized requirements. This process starts with understanding metrology challenges and budget constraints, followed by in depth analysis by our application and development engineers. Customizing data acquisition software, analysis tools, and user interfaces is a part of our approach to solve unique metrology application tasks.