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The new Polaris Desktop 3D surface measuring system from Solarius enables highly accurate and precise 3D imaging of surfaces. While the Polaris and the Polaris Plus are equal in accuracy and precision, the Polaris offers a cost effective variant for many applications. The Polaris Plus expands the scope of application due to its extensive equipment, which supports in particular simple automation of the measurement tasks.

Key Features:

  • Highest optical and digital resolution
  • Diffraction limited imaging
  • Reliable technology
  • ISO compliant roughness values
  • Non-contact measurements
  • Maintenance-free and robust

Sensor Types:

  • Confocal area sensors
  • Interferometric area sensors

The Solarius Polaris 3D measuring system is based on the spinning disc confocal technique, proven over many years. In the design and calculation of the optics, great importance was attached to a physically optimal diffraction limitation ofthe optical system, which allows for accurate, precise and repeatable lateral measurements even in structural areas far below one micrometer.

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Technical Specification

Lateral Working Range 150 mm x 150 mm
Vertical Working Range 400 µm to 100 mm
Lateral Resoultion 70 nm up
Vertical Resolution 0.1 nm up

For further details, please refer to enclosed brochure.

  • Semiconductor, Solar & Electronics
SolariusSolarius is a leading provider of precision systems for non-contact surface inspection, measurement, analysis, and visualization. Our products combine high-resolution sensors with automated data acquisition systems and powerful analysis tools. Offerings range from desktop systems for off-line inspection, to semi-automated systems for fast, precise measurements, to customized multi-station platforms for high-volume in-line inspection. Our design philosophy focuses on standard products as well as customized solutions to best meet specialized requirements. This process starts with understanding metrology challenges and budget constraints, followed by in depth analysis by our application and development engineers. Customizing data acquisition software, analysis tools, and user interfaces is a part of our approach to solve unique metrology application tasks.