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The AOP platform is the most flexible and modular Solarius solution for all kinds of customized measurement tasks. Depending on the indivisual task, it can be equipped with different 3D measuring sensors out the entire available technology portfolio, many sizes of motion systems and customized software. Its flexibility supports a wide variety of applications and working environments and can be tailored to meet each customer’s requirements.

Sensor Types:

  • Chromatic confocal point sensors
  • Chromatic confocal line sensors
  • Confocal matrix sensors
  • Interferometric matrix sensors
  • Focus variation matrix sensors
  • Point triangulation sensors
  • Line triangulation sensors

The modular AOP platform can be equipped with all availabe non-destructive measurement technologies, including chromatic confocal point and line sensors, confocal area sensors, laser line triangulation sensors, interferometric sensors, and 2D camera systems. Height resolutions down to the single nm are supported same as high speed measurements of up to 80,000 points in 130 milliseconds. Vibration isolation and a lateral measurement range up to 500 mm or more make the AOP the best solution for all kinds of measurement tasks.

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Technical Specification

Lateral Working Range up to 500 mm x 500 mm
Vertical Working Range 100 µm to 80 mm
Lateral Resoultion 1 µm up
Vertical Resolution 1 nm up

For further details, please refer to enclosed brochure.

Solarius AOP Custom

  • Semiconductor, Solar & Electronics
SolariusSolarius is a leading provider of precision systems for non-contact surface inspection, measurement, analysis, and visualization. Our products combine high-resolution sensors with automated data acquisition systems and powerful analysis tools. Offerings range from desktop systems for off-line inspection, to semi-automated systems for fast, precise measurements, to customized multi-station platforms for high-volume in-line inspection. Our design philosophy focuses on standard products as well as customized solutions to best meet specialized requirements. This process starts with understanding metrology challenges and budget constraints, followed by in depth analysis by our application and development engineers. Customizing data acquisition software, analysis tools, and user interfaces is a part of our approach to solve unique metrology application tasks.